JPH0719081Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0719081Y2 JPH0719081Y2 JP4813189U JP4813189U JPH0719081Y2 JP H0719081 Y2 JPH0719081 Y2 JP H0719081Y2 JP 4813189 U JP4813189 U JP 4813189U JP 4813189 U JP4813189 U JP 4813189U JP H0719081 Y2 JPH0719081 Y2 JP H0719081Y2
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- shield
- slit
- shields
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 238000010891 electric arc Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 230000005291 magnetic effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813189U JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813189U JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02138839U JPH02138839U (en]) | 1990-11-20 |
| JPH0719081Y2 true JPH0719081Y2 (ja) | 1995-05-01 |
Family
ID=31564671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4813189U Expired - Lifetime JPH0719081Y2 (ja) | 1989-04-24 | 1989-04-24 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719081Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2837023B2 (ja) * | 1991-05-14 | 1998-12-14 | アプライド マテリアルズ インコーポレイテッド | イオン源の寿命を向上させたイオン打ち込み装置 |
| JP5545452B2 (ja) * | 2011-09-22 | 2014-07-09 | 日新イオン機器株式会社 | プラズマ閉じ込め容器およびこれを備えたイオン源 |
-
1989
- 1989-04-24 JP JP4813189U patent/JPH0719081Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02138839U (en]) | 1990-11-20 |
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